To develop the high-performance filters and duplexers required for recent long-term evolution frequency bands in mobile handsets, a surface acoustic wave (SAW) resonator is needed that has a higher quality (Q) and a lower temperature coefficient of frequency (TCF). To achieve this, the authors focused on acoustic energy confinement in the depth direction for a rotated Y-X LiTaO (LT) substrate. Characteristics of multilayered substrates with low-impedance and high-impedance layers under LT layer were studied numerically in terms of acoustic energy distribution, phase velocity, coupling coefficient, and temperature characteristics employing a finite-element method simulation. After several calculations, a novel multilayered structure was developed that uses SiO for a low-impedance layer and AlN for a high-impedance layer under the thin LT layer. A one-port resonator using the new substrate was fabricated, and its experimental results showed that the developed resonator had a Bode-Q over 4000 and TCF of -8 ppm/°C, which are four times higher than and one-fifth as small as those of a conventional 4° YX-LT SAW resonator, respectively. By applying this technology, a band 25 duplexer with very narrow duplex gap was successfully developed, which shows extremely low insertion loss, steep cutoff characteristics, and stable temperature characteristics.
In this paper, we discuss the generation mechanisms of third-order nonlinearity in surface acoustic wave (SAW) devices on the basis of simulation results, which are obtained by a proposed method for this discussion. First, eight nonlinear terms are introduced to the piezoelectric constitutive equations, and nonlinear stress and electric flux fields are estimated using linear strain and electric fields calculated by a linear analysis, i.e., the coupling of mode simulation. Then, their contributions are embedded as voltage and current sources, respectively, in an equivalent circuit model, and nonlinear signals appearing at external ports are estimated. It is shown that eight coefficients of the nonlinear terms can be determined from a series of experiments carried out at various driving and resulting frequencies. This is because the effect of each nonlinear term on the nonlinear signal outputs changes markedly with the conditions. When the coefficients are determined properly, the simulations agree well with some measurement results under various conditions.
In this study, we examine the generation mechanisms of the second-order nonlinear signals in surface acoustic wave resonators/duplexers fabricated on a 42°YX-LiTaO3 substrate. It is shown that the crystal asymmetry of the substrate can generate the second-order nonlinear signals. The following two mechanisms mainly contribute to their generation: (a) self-mixing of the electrostatic field and (b) mixing of the electrostatic field with the strain field associated with laterally propagating modes. Both of them occur at the gaps between the electrode tip and the dummy electrode. In addition, an interdigital transducer design that cancels this asymmetry is proposed. The design is applied to a one-port resonator and a duplexer, and the effectiveness of this technique is demonstrated.
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