Predictive MOSFET models are critical for early stage designtechnology co-optimization and circuit design research. In this work, Predictive Technology Model files for sub-20nm multi-gate transistors have been developed (PTM-MG). Based on MOSFET scaling theory, the 2011 ITRS roadmap and early stage silicon data from published results, PTM for FinFET devices are generated for 5 technology nodes corresponding to the years 2012-2020 on the ITRS roadmap.

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Self-aligned double patterning (SADP) is being considered for use at the 10-nm technology node and below for routing layers with pitches down to ∼50 nm because it has better line edge roughness and overlay control compared to other multiple patterning candidates. To date, most of the SADPrelated literature has focused on enabling SADP-legal routing in physical design tools while few attempts have been made to address the impact SADP routing has on local, standard cell (SC) I/O pin access. At the same time, via layers are used to connect the local SADP routing layers to the I/O pins on lower metal layers. Due to the high via density on the Via-1 layer, the litho-etch-litho-etch (LELE)-aware Via-1 design becomes a necessity to achieve legal pin access at the SC level. In this paper, we present the first study on SADP-aware pin access and layout optimization at the SC level. Accounting for SADP-specific and Via-1 design rules, we propose a coherent framework that uses depth first search, mixed integer linear programming, and backtracking method to enable LELE friendly Via-1 design and simultaneously optimize SADP-based local pin access and within-cell connections. Our experimental results show that, compared with the conventional approach, our framework effectively improves pin access of the SCs and maximizes the pin access flexibility for routing.Index Terms-Double patterning, pin access, self-aligned double patterning (SADP), standard cell (SC) layout, Via-1 assignment.

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Abstract-In this paper, we have studied the impact of quantum confinement on the performance of n-type silicon nanowire transistors (NWTs) for application in advanced CMOS technologies. The 3-D drift-diffusion simulations based on the density gradient approach that has been calibrated with respect to the solution of the Schrödinger equation in 2-D cross sections along the direction of the transport are presented. The simulated NWTs have cross sections and dimensional characteristics representative of the transistors expected at a 7-nm CMOS technology. Different gate lengths, cross-sectional shapes, spacer thicknesses, and doping steepness were considered. We have studied the impact of the quantum corrections on the gate capacitance, mobile charge in the channel, drain-induced barrier lowering, and subthreshold slope. The mobile charge to gate capacitance ratio, which is an indicator of the intrinsic speed of the NWTs, is also investigated. We have also estimated the optimal gate length for different NWT design conditions.

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