Quantitative deflectometry is a new tool to measure specular surfaces. The spectrum of measurable surfaces ranges from flat to freeform surfaces with steep slopes, with a size ranging from millimeters to several meters. We illustrate this by several applications: eye glass measurements, measurements of big mirrors, and in-line measurements in ultra-precision manufacturing without unclamping of the sample. We describe important properties of deflectometry and compare its potentials and limitations with interferometry. We discuss which method is superior for which application and how the potential of deflectometry may be developing in the future.
Phase Measuring Deflectometry (PMD) acquires the two components of the local surface gradient via a sequence of two orthogonal sinusoidal fringe patterns that have to be displayed and captured separately. We will demonstrate that the sequential process (different fringe directions, phase shifting) can be completely avoided by using a cross fringe pattern. With an optimized Fourier evaluation, high quality data of smooth optical surfaces can be acquired within one single shot. The cross fringe pattern allows for one more improvement of PMD: we will demonstrate a novel phase-shift technique, where a one-dimensional N-phase shift allows for the acquisition of the two orthogonal phases, with only N exposures instead of 2N exposures. So, PMD can be implemented by a one-dimensional translation of the fringe pattern, instead of the common two-dimensional translation, which is quite useful for certain applications.
Phase-measuring deflectometry (PMD) has become a standard tool to measure the topography of specular surfaces. We implemented PMD for the measurement of the human cornea topography, exploiting an earlier idea of Lingelbach et al. Two problems occur: a large angular dynamical range and a single-shot measurement are required. We solve these problems by an optimized geometry with minimal occlusion and by single sideband demodulation with a pre-distorted fringe pattern with optimal fringe period. An
We discuss the inspection of large-sized, spherical mirror tiles by 'Phase Measuring Deflectometry' (PMD). About 10 000 of such mirror tiles, each satisfying strict requirements regarding the spatial extent of the point-spreadfunction (PSF), are planned to be installed on the Cherenkov Telescope Array (CTA), a future ground-based instrument to observe the sky in very high energy gamma-rays. Owing to their large radii of curvature of up to 60 m, a direct PSF measurement of these mirrors with concentric geometry requires large space. We present a PMD sensor with a footprint of only 5 × 2 × 1.2 m 3 that overcomes this limitation. The sensor intrinsically acquires the surface slope; the shape data are calculated by integration. In this way, the PSF can be calculated for real case scenarios, e.g., when the light source is close to infinity and off-axis. The major challenge is the calibration of the PMD sensor, specifically because the PSF data have to be reconstructed from different camera views. The calibration of the setup is described, and measurements presented and compared to results obtained with the direct approach.
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