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A single-beam megasonic system for nano-particle cleaning which less likely cause nano-pattern damage was designed. Considering ultrasonic wave propagation, a length of quartz waveguide was decided at a uniform acoustic wave region. The anti-resonance frequency of the piezoelectric actuator was measured to be 987 kHz, which agreed well with the fabricated quartz waveguide operating frequency of 983 kHz. The acoustic pressure of the single-beam megasonic system was measured, and the averaged value increased by 89% compared with a commercially available product (named an A-type). To compare uniformity, standard deviations of acoustic pressure values were calculated, and they were lower than A-type results by 20%. These results explain our system's performance improvement in acoustic pressure distribution. In addition, particle removal efficiency (PRE) tests were performed, and 91% of particles were removed after megasonic cleaning.
A multi-frequency megasonic system for nano-particle removal was developed. In design process, finite element analysis was performed and anti-resonance frequency for 1 MHz actuating, was predicted as 995 kHz with 0.5% error compared with the measured value of 1000 kHz. In addition, anti-resonance frequency of 2998 kHz was obtained for 3 MHz, which coincided with the measured value. For the verification of the system performance, acoustic pressures of the developed waveguide were measured and compared with a commercial megasonic system. The result revealed that the developed one can show relatively better distributions. To assess cleaning ability, particle removal efficiency (PRE) tests were processed and 56.1% PRE improvement was achieved compared with a conventional product. Considering these results, the developed system can be applied to nano-particle cleaning process with higher efficiency.
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