Thermochemical laser-induced periodic surface structures (TLIPSS) are a relatively new type of periodic structures formed in the focal area of linear polarized laser radiation by the thermally stimulated reaction of oxidation. The high regularity of the structures and the possibility of forming high-ordered structures over a large area open up possibilities for the practical application for changing the optical and physical properties of materials surface. Since the mechanism of formation of these structures is based on a chemical oxidation reaction, an intriguing question involves the influence of air pressure on the quality of structure formation. This paper presents the results on the TLIPSS formation on a thin hafnium film with fs IR laser radiation at various ambient air pressures from 4 Torr to 760 Torr. Despite the decrease in the oxygen content in the ambient environment by two orders of magnitude, the formation of high-ordered TLIPSS (dispersion in the LIPSS orientation angle δθ < 5°) with a period of ≈700 nm occurs within a wide range of parameters variation (laser power, scanning speed). This behavior of TLIPSS formation is in agreement with experimental data obtained earlier on the study of the kinetics of high-temperature oxidation of hafnium at various oxygen pressures.
In this data paper we share the information on refractive index and extinction coefficient of metallic films of the titanium group (Ti, Zr, Hf), measured by ellipsometry in the wavelength range of 300–1100 nm. The presented data can be used to indirectly measure the thickness of metal films when they are sputtered onto a substrate, using the measured data on transmission and reflection coefficients depending on the wavelength of the probe beam, as well as to calculate the energy characteristics of diffraction gratings, formed on the surface of these films, under rigorous electromagnetic theory. The data were used in the research article “Increasing the spatial resolution of direct laser writing of diffractive structures on thin films of titanium group metals” [1].
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