As an emerging n-type semiconductor, ZnO has been widely applied in sensor area. In this study, we prepared an ethylene sensor using ZnO layer on FTO glass substrate. The seed layer was deposited using simple electrodeposition method using voltage of -1.1 V for 2 hours in cold bath (6°C). The ZnO layer was further grown using CBD technique at 90°C for 2 hours. In order to observe the effect of structural manipulation on the sensor performance, some of the ZnO layer samples were undergoing hydrothermal treatment at 100ºC for 1 hour under 1 bar N2 gas. After annealing process, all ZnO layers were exposed with 50 ppm ethylene gas in closed chamber. Based on the results, it is shown that the optimum ZnO layer has been successfully identified the ethylene gas in concentration of 50 ppm, with response value of 2.40% at 200°C.
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