Abstract. This paper presents turbulence investigations in the scrape off layer (SOL) of ASDEX Upgrade in Ohmic, L-mode and H-mode discharges using electrostatic and electromagnetic probes. Detailed studies are performed on small scale turbulence and on ELM filaments. Simultaneous measurements of floating and plasma potential fluctuations revealed significant differences between these quantities. Large errors can occur when the electric field is extracted from floating potential measurements, even in Ohmic discharges. Turbulence studies in Ohmic plasmas show the existence of density holes inside the separatrix and blobs outside. Close to the separatrix a reversal of the poloidal blob propagation velocity occurs. Investigations on the Reynolds stress in the scrape-off layer show its importance for the momentum transport in L-mode while its impact for momentum transport during ELMs in H-mode is rather small. In the far SOL the electron density and temperature were measured during type-I ELMy H-mode at ASDEX Upgrade resolving ELM filaments. Strong density peaks and temperatures of several 10 eV were detected during the ELM events. Additional investigations on the ions in the filaments by a retarding field analyzer indicate ion temperatures of 50-80 eV. ELMs expel also current concentrated in filaments into the scrape off layer. Furthermore discharges with small ELMs were studied. In N 2 seeded discharges the type-I ELM frequency rises and the ELM duration decreases. For discharges with small type-II ELMs the mean turbulent radial particle flux is increased over the mean particle flux in type-I ELM discharges at otherwise similar plasma parameters.

Abstract. High power impulse magnetron sputtering (HiPIMS) plasmas generate energetic metal ions at the substrate as a major difference to conventional direct current magnetron sputtering (dcMS). The origin of these very energetic ions in HiPIMS is still an open issue, which is unraveled by using two fast diagnostics: time resolved mass spectrometry with a temporal resolution of 2 µs and phase resolved optical emission spectroscopy with a temporal resolution of 1 µs. A power scan from dcMS-like to HiPIMS plasmas was performed, with a 2-inch magnetron and a titanium target as sputter source and argon as working gas. Clear differences in the transport as well in the energetic properties of Ar + , Ar 2+ , Ti + and Ti 2+ were observed. For discharges with highest peak power densities a high energetic group of Ti + and Ti 2+ could be identified with energies of approximately 25 eV and of 50 eV, respectively. A cold group of ions is always present. It is found that hot ions are observed only, when the plasma enters the spokes regime, which can be monitored by oscillations in the IV-characteristics in the MHz range that are picked up by the used VI-probes. These oscillations are correlated with the spokes phenomenon and are explained as an amplification of the Hall current inside the spokes as hot ionization zones. To explain the presence of energetic ions, we propose a double layer (DL) confining the hot plasma inside a spoke: if an atom becomes ionized inside the spokes region it is accelerated because of the DL to higher energies whereas its energy remains unchanged if it is ionized outside. In applying this DL model to our measurements the observed phenomena as well as several measurements from other groups can be explained. Only if spokes and a double layer are present the confined particles can gain enough energy to leave the magnetic trap. We conclude from our findings that the spoke phenomenon represents the essence of HiPIMS plasmas, explaining their good performance for material synthesis applications. ‡

The rotation of localised ionisation zones, i.e. spokes, in magnetron discharge are frequently observed. The spokes are investigated by measuring floating potential oscillations with 12 flat probes placed azimuthally around a planar circular magnetron. The 12-probe setup provides sufficient temporal and spatial resolution to observe the properties of various spokes, such as rotation direction, mode number and angular velocity. The spokes are investigated as a function of discharge current, ranging from 10 mA (current density 0.5 mA cm −2) to 140 A (7 A cm −2). In the range from 10 mA to 600 mA the plasma was sustained in DC mode, and in the range from 1 A to 140 A the plasma was pulsed in high-power impulse magnetron sputtering mode. The presence of spokes throughout the complete discharge current range indicates that the spokes are an intrinsic property of a magnetron sputtering plasma discharge. The spokes may disappear at discharge currents above 80 A for Cr, as the plasma becomes homogeneously distributed over the racetrack. Up to discharge currents of several amperes (the exact value depends on the target material), the spokes rotate in a retrograde × E B direction with angular velocity in the range of 0.2-4 km s −1. Beyond a discharge current of several amperes, the spokes rotate in a × E B direction with angular velocity in the range of 5-15 km s −1. The spoke rotation reversal is explained by a transition from Ar-dominated to metal-dominated sputtering that shifts the plasma emission zone closer to the target. The spoke itself corresponds to a region of high electron density and therefore to a hump in the electrical potential. The electric field around the spoke dominates the spoke rotation direction. At low power, the plasma is further away from the target and it is dominated by the electric field to the anode, thus retrograde × E B rotation. At high power, the plasma is closer to the target and it is dominated by the electric field pointing to the target, thus × E B rotation.

The temporal distribution of the incident fluxes of argon and titanium ions on the substrate during an argon HiPIMS pulse to sputter titanium with pulse lengths between 50 to 400 µs and peak powers up to 6 kW are measured by energy-resolved ion mass spectrometry with a temporal resolution of 2 µs. The data are correlated with time-resolved growth rates and with phase-resolved optical emission spectra. Four ion contributions impinging on the substrate at different times and energies are identified: (i) an initial argon ion burst after ignition, (ii) a titanium and argon ion flux in phase with the plasma current due to ionized neutrals in front of the target, (iii) a small energetic burst of ions after plasma shut off, and (iv) cold ions impinging on the substrate in the late afterglow showing a pronounced maximum in current. The last contribution originates from ions generated during the plasma current maximum at 50 µs after ignition in the magnetic trap in front of the target. They require long transport times of a few 100 µs to reach the substrate. All energy distributions can be very well fitted with a shifted Maxwellian indicating an efficient thermalization of the energetic species on their travel from target to substrate. The energy of titanium is higher than that of argon, because they originate from energetic neutrals of the sputter process. The determination of the temporal sequence of species, energies and fluxes in HiPIMS may lead to design rules for the targeted generation of these discharges and for synchronized biasing concepts to further improve the capabilities of high-power impulse magnetron sputtering (HiPIMS) processes.

High power impulse magnetron sputtering (HiPIMS) is a versatile technology to deposit thin films with superior properties. During HiPIMS, the power is applied in short pulses of the order of 100 μs at power densities of kW to a magnetron target creating a torus shaped dynamic high density plasma. This plasma torus is not homogeneous, but individual ionization zones become visible, which rotate along the torus with velocities of 10 km . Up to now, however, any direct measurement of the electron density inside these rotating ionization zones is missing. Here, we probe the electron density by measuring the target current locally by using small inserts embedded in an aluminium target facing the plasma torus. By applying simple sheath theory, a plasma density of the order of at the sheath edge can be inferred. The plasma density increases with increasing target current. In addition, the dynamics of the local target current variation is consistent with the dynamics of the traveling ionization zone causing a modulation of the local current density by 25%.