Thin cathodes for micro‐solid oxide fuel cells (micro‐SOFCs) are fabricated by spin‐coating a suspension of La0.6Sr0.4CoO3–δ (LSC) nanoparticulates obtained by salt‐assisted spray pyrolysis. The resulting 250 nm thin LSC layers exhibit a three‐dimensional porous microstructure with a grain size of around 45 nm and can be integrated onto free‐standing 3 mol.% yttria‐stabilized‐zirconia (3YSZ) electrolyte membranes with high survival rates. Weakly buckled micro‐SOFC membranes enable a homogeneous distribution of the LSC dispersion on the electrolyte, whereas the steep slopes of strongly buckled membranes do not allow for a perfect LSC coverage. A micro‐SOFC membrane consisting of an LSC cathode on a weakly buckled 3YSZ electrolyte and a sputtered Pt anode has an open‐circuit voltage of 1.05 V and delivers a maximum power density of 12 mW cm–2 at 500 °C.
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