Optomechanical devices sensitively transduce and actuate motion of nanomechanical structures using light. Single-crystal diamond promises to improve the performance of optomechanical devices, while also providing opportunities to interface nanomechanics with diamond color center spins and related quantum technologies. Here we demonstrate dissipative waveguide-optomechanical coupling exceeding 35 GHz/nm to diamond nanobeams supporting both optical waveguide modes and mechanical resonances, and use this optomechanical coupling to measure nanobeam displacement with a sensitivity of 9.5 fm/ √ Hz and optical bandwidth > 150nm. The nanobeams are fabricated from bulk optical grade single-crystal diamond using a scalable undercut etching process, and support mechanical resonances with quality factor 2.5 × 10 5 at room temperature, and 7.2 × 10 5 in cryogenic conditions (5K). Mechanical self-oscillations, resulting from interplay between photothermal and optomechanical effects, are observed with amplitude exceeding 200 nm for sub-µW absorbed optical power, demonstrating the potential for optomechanical excitation and manipulation of diamond nanomechanical structures.

Single-crystal diamond cavity optomechanical devices are a promising example of a hybrid quantum system: by coupling mechanical resonances to both light and electron spins, they can enable new ways for photons to control solid state qubits. However, realizing cavity optomechanical devices from high quality diamond chips has been an outstanding challenge. Here we demonstrate single-crystal diamond cavity optomechanical devices that can enable photon-phonon-spin coupling. Cavity optomechanical coupling to $2\,\text{GHz}$ frequency ($f_\text{m}$) mechanical resonances is observed. In room temperature ambient conditions, these resonances have a record combination of low dissipation (mechanical quality factor, $Q_\text{m} > 9000$) and high frequency, with $Q_\text{m}\cdot f_\text{m} \sim 1.9\times10^{13}$ sufficient for room temperature single phonon coherence. The system exhibits high optical quality factor ($Q_\text{o} > 10^4$) resonances at infrared and visible wavelengths, is nearly sideband resolved, and exhibits optomechanical cooperativity $C\sim 3$. The devices' potential for optomechanical control of diamond electron spins is demonstrated through radiation pressure excitation of mechanical self-oscillations whose 31 pm amplitude is predicted to provide 0.6 MHz coupling rates to diamond nitrogen vacancy center ground state transitions (6 Hz / phonon), and $\sim10^5$ stronger coupling rates to excited state transitions.Comment: 12 pages, 5 figure

READ THESE TERMS AND CONDITIONS CAREFULLY BEFORE USING THIS WEBSITE.http://nparc.cisti-icist.nrc-cnrc.gc.ca/eng/copyright Vous avez des questions? Nous pouvons vous aider. Pour communiquer directement avec un auteur, consultez la première page de la revue dans laquelle son article a été publié afin de trouver ses coordonnées. Si vous n'arrivez pas à les repérer, communiquez avec nous à PublicationsArchive-ArchivesPublications@nrc-cnrc.gc.ca. Questions? Contact the NRC Publications Archive team atPublicationsArchive-ArchivesPublications@nrc-cnrc.gc.ca. If you wish to email the authors directly, please see the first page of the publication for their contact information. NRC Publications Archive Archives des publications du CNRCThis publication could be one of several versions: author's original, accepted manuscript or the publisher's version. / La version de cette publication peut être l'une des suivantes : la version prépublication de l'auteur, la version acceptée du manuscrit ou la version de l'éditeur. For the publisher's version, please access the DOI link below./ Pour consulter la version de l'éditeur, utilisez le lien DOI ci-dessous.http://doi.org/10.1021/acs.nanolett.5b01346Access and use of this website and the material on it are subject to the Terms and Conditions set forth at High-Q/V monolithic diamond microdisks fabricated with quasiisotropic etching Khanaliloo, Behzad; Mitchell, Matthew; Hryciw, Aaron C.; Barclay, Paul E. NRC Publications Record / Notice d'Archives des publications de CNRC:http://nparc.cisti-icist.nrc-cnrc.gc.ca/eng/view/object/?id=65852c4c-ce37-4aff-a42f-101c402dccf7 http://nparc.cisti-icist.nrc-cnrc.gc.ca/fra/voir/objet/?id=65852c4c-ce37-4aff-a42f-101c402dccf7 High-Q/V Monolithic Diamond Microdisks Fabricated with Quasiisotropic EtchingBehzad Khanaliloo, †, ‡ Matthew Mitchell, †, ‡ Aaron C. Hryciw, ‡, § and Paul E. Barclay* , †, ‡ † Department of Physics and Astronomy and Institute for Quantum Science and Technology, University of Calgary, Calgary, AB T2N 1N4, Canada ‡ National Institute for Nanotechnology, 11421 Saskatchewan Drive Northwest, Edmonton, AB T6G 2M9, Canada § nanoFAB Facility, University of Alberta, Edmonton, AB T6G 2R3, Canada ABSTRACT: Optical microcavities enhance light−matter interactions and are essential for many experiments in solid state quantum optics, optomechanics, and nonlinear optics. Single crystal diamond microcavities are particularly sought after for applications involving diamond quantum emitters, such as nitrogen vacancy centers, and for experiments that benefit from diamond's excellent optical and mechanical properties. Light−matter coupling rates in experiments involving microcavities typically scale with Q/V, where Q and V are the microcavity quality-factor and mode-volume, respectively. Here we demonstrate that microdisk whispering gallery mode cavities with high Q/V can be fabricated directly from bulk single crystal diamond. By using a quasi-isotropic oxygen plasma to etch along diamond crystal planes and undercut passivated diamond structures...

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